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- Extremely High Requirements for Temperature Control Precision
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Temperature Control Requirements
Many processes in semiconductor manufacturing, such as photolithography and etching, are extremely sensitive to changes in the environmental temperature. Even the slightest temperature fluctuations may lead to problems such as dimensional deviations of chips and unstable performance, seriously affecting the yield rate of products.
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- Strict Requirements for Humidity Control
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Humidity Control Requirements
Both excessively high and low humidity levels can have negative impacts on semiconductor materials and equipment. High humidity is likely to cause condensation on the surface of chips, resulting in short circuits. Low humidity, on the other hand, may generate static electricity, damaging delicate electronic components.
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- Stringent Requirements for Cleanliness
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Cleanliness Requirements
Semiconductor production workshops must maintain a high level of cleanliness. Once pollutants such as dust particles and microorganisms in the air enter the production process, they may adhere to the chips, leading to circuit short circuits or other functional failures.
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Solution Overview
Precision, Efficiency, and Reliability
With years of technical accumulation and rich experience in the air conditioning field, Veck provides a comprehensive, efficient, and reliable environmental control solution tailored to the special needs of the semiconductor industry. By integrating advanced refrigeration technology, precise temperature and humidity control algorithms, an efficient air purification system, and an intelligent monitoring and management platform, Veck creates an ideal environmental condition for semiconductor production workshops, helping enterprises improve production efficiency and product quality.
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High-precision Temperature Control
By adopting the advanced PID control algorithm and combining it with high-precision temperature sensors, it is possible to conduct real-time monitoring and precise adjustment of the temperature in the workshop. The refrigeration system is equipped with efficient compressors and heat exchangers, which can automatically adjust the cooling capacity according to the changes in the workshop load, ensuring that the temperature fluctuations are controlled within a very small range. This meets the strict requirements of semiconductor manufacturing for temperature stability and effectively improves the yield rate of products. At the same time, the intelligent control system can flexibly set temperature parameters according to the needs of different production processes, enhancing the adaptability of the production process.
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Strict Humidity Control
It is equipped with professional humidity regulation devices, including humidifiers and rotary dehumidifiers. The air humidity is monitored in real time through humidity sensors. When the humidity exceeds the set range, the system automatically starts the humidifier or dehumidifier for adjustment. The humidity control precision is high, which can effectively avoid the damage to semiconductor materials and equipment caused by excessively high or low humidity. The unique dehumidification technology ensures that while dehumidifying efficiently, the temperature in the workshop remains stable, providing an ideal humidity environment for production.
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Efficient Air Purification
A multi - stage air filtration system is adopted, including primary, medium - efficiency, and high - efficiency filters, which can effectively remove pollutants such as dust particles and microorganisms in the air. The filters are made of high - quality filter materials, featuring high filtration efficiency and long life, and can provide a highly clean air environment for semiconductor production workshops. Regular filter replacement reminders and intelligent monitoring of the filtration system ensure that the air purification system always operates in an ideal state.
